Piezoresistive Accelerometer

The core of a piezoresistive accelerometer is the piezoresistive effect. It utilizes a micromachined cantilever beam or proof mass made of semiconductor materials such as silicon. When the accelerometer experiences acceleration, the inertial force causes the proof mass to deform. This deformation stretches or compresses the piezoresistive material attached to the beam, leading to a change in its electrical resistance. By measuring this change in resistance (typically using a Wheatstone bridge circuit), the magnitude of the acceleration can be accurately calculated.

Due to its unique operating principle, piezoresistive accelerometers offer high sensitivity, a wide measurement range, robust structure, and high-frequency response. However, they generally have higher power consumption and are sensitive to temperature (requiring temperature compensation).

Based on these characteristics, their applications are primarily focused on fields that require the measurement of high-frequency, high-impact (high-g), dynamic events.