Ceramic pressure sensor
Ceramic Pressure Sensors refer to sensors that use alumina ceramic as their core pressure-sensing elastic element. They primarily utilize thick-film printing and high-temperature co-firing processes to directly form a piezoresistive Wheatstone bridge on the back of a ceramic diaphragm. When the ceramic diaphragm undergoes minimal deformation due to pressure, it causes a change in resistance, thereby outputting an electrical signal.
Working Principle
The core principle is the piezoresistive effect, but the implementation differs from diffused silicon:
Base Material: Uses high-purity, highly elastic alumina ceramic substrates.
Manufacturing Process:
On the back of the ceramic substrate, a special resistor paste (often containing precious metals) is printed into a Wheatstone bridge pattern using thick-film printing technology.
The printed substrate is then sintered at high temperatures (typically over 1000°C), firmly bonding the resistor paste with the ceramic substrate into a single unit.
Operating Process:
Pressure acts on the front side of the ceramic diaphragm.
The ceramic diaphragm undergoes extremely slight bending deformation.
This deformation is transferred to the thick-film resistors on the back, causing their resistance values to change.
The change in resistance of the four resistors connected in a Wheatstone bridge is converted into a voltage output signal proportional to the pressure.
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